JPH0374360B2 - - Google Patents
Info
- Publication number
- JPH0374360B2 JPH0374360B2 JP58090879A JP9087983A JPH0374360B2 JP H0374360 B2 JPH0374360 B2 JP H0374360B2 JP 58090879 A JP58090879 A JP 58090879A JP 9087983 A JP9087983 A JP 9087983A JP H0374360 B2 JPH0374360 B2 JP H0374360B2
- Authority
- JP
- Japan
- Prior art keywords
- collimator
- ray
- diffraction
- ray spectrometer
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000013078 crystal Substances 0.000 claims description 42
- 238000002083 X-ray spectrum Methods 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
- G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/36—Measuring spectral distribution of X-rays or of nuclear radiation spectrometry
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Analytical Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Dispersion Chemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US382015 | 1982-05-26 | ||
| US06/382,015 US4472825A (en) | 1982-05-26 | 1982-05-26 | Double crystal X-ray spectrometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5963550A JPS5963550A (ja) | 1984-04-11 |
| JPH0374360B2 true JPH0374360B2 (en]) | 1991-11-26 |
Family
ID=23507216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58090879A Granted JPS5963550A (ja) | 1982-05-26 | 1983-05-25 | Ｘ線分光計 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4472825A (en]) |
| EP (1) | EP0095207B1 (en]) |
| JP (1) | JPS5963550A (en]) |
| DE (1) | DE3373362D1 (en]) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6193936A (ja) * | 1984-10-13 | 1986-05-12 | Furukawa Electric Co Ltd:The | 放射線による被測定物の組成分析方法 |
| US4796284A (en) * | 1984-12-31 | 1989-01-03 | North American Philips Corporation | Polycrystalline X-ray spectrometer |
| US4698833A (en) * | 1985-05-14 | 1987-10-06 | Energy Conversion Devices, Inc. | Subassembly, method and system for monochromatizing X-rays |
| DE3670376D1 (de) * | 1985-11-04 | 1990-05-17 | Philips Corp | Doppelkristall-roentgenstrahlspektrometer. |
| US4752945A (en) * | 1985-11-04 | 1988-06-21 | North American Philips Corp. | Double crystal X-ray spectrometer |
| JPH09166488A (ja) * | 1995-12-13 | 1997-06-24 | Shimadzu Corp | Ｘ線分光器 |
| US5912940A (en) * | 1996-06-10 | 1999-06-15 | O'hara; David | Combination wavelength and energy dispersive x-ray spectrometer |
| US6787773B1 (en) | 2000-06-07 | 2004-09-07 | Kla-Tencor Corporation | Film thickness measurement using electron-beam induced x-ray microanalysis |
| US6801596B2 (en) | 2001-10-01 | 2004-10-05 | Kla-Tencor Technologies Corporation | Methods and apparatus for void characterization |
| US6664541B2 (en) | 2001-10-01 | 2003-12-16 | Kla Tencor Technologies Corporation | Methods and apparatus for defect localization |
| US6810105B2 (en) * | 2002-01-25 | 2004-10-26 | Kla-Tencor Technologies Corporation | Methods and apparatus for dishing and erosion characterization |
| US7099437B2 (en) * | 2002-09-23 | 2006-08-29 | The Johns Hopkins University | Double crystal analyzer linkage |
| US7202475B1 (en) * | 2003-03-06 | 2007-04-10 | Kla-Tencor Technologies Corporation | Rapid defect composition mapping using multiple X-ray emission perspective detection scheme |
| DE102016014213A1 (de) * | 2015-12-08 | 2017-07-06 | Shimadzu Corporation | Röntgenspektroskopische analysevorrichtung und elementaranalyseverfahren |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1638683A (en) * | 1925-01-17 | 1927-08-09 | Demarchi Mario | Shield for use in the production of radioscopes or radiographs |
| DE1127613B (de) * | 1958-06-16 | 1962-04-12 | Philips Nv | Vorrichtung zur roentgenspektro-chemischen Analyse durch Fluoreszenzstrahlung |
| US3397312A (en) * | 1964-08-15 | 1968-08-13 | Hitachi Ltd | Laminated X-ray analyzing crystal wherein the respective laminations have different lattice spacings |
| US3997794A (en) * | 1974-12-23 | 1976-12-14 | York Richard N | Collimator |
| US3980568A (en) * | 1975-10-17 | 1976-09-14 | Hankison Corporation | Radiation detection system |
-
1982
- 1982-05-26 US US06/382,015 patent/US4472825A/en not_active Expired - Fee Related
-
1983
- 1983-05-17 EP EP83200691A patent/EP0095207B1/en not_active Expired
- 1983-05-17 DE DE8383200691T patent/DE3373362D1/de not_active Expired
- 1983-05-25 JP JP58090879A patent/JPS5963550A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| EP0095207B1 (en) | 1987-09-02 |
| US4472825A (en) | 1984-09-18 |
| DE3373362D1 (en) | 1987-10-08 |
| EP0095207A1 (en) | 1983-11-30 |
| JPS5963550A (ja) | 1984-04-11 |
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